WP2: Ion Implantation and Silicidation
Deliverable D2.1: First Batch of Experimental Results on Heated Implants and SPER (September 2021)
Deliverable D2.2: Atomistic Catalogue of Events for Calibration of LKMC Dedicated to Silicidation and First Batch of Experimental Results on Silicidation of Si Bulk Materials (August 2021)
Deliverable D2.5: Final Experimental Results on Silicidation of Si and SiGe Bulk Materials and Nanowires (December 2022)