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Modeling Unconventional Nanoscaled Device FABrication
Modeling Unconventional Nanoscaled Device FABrication
Fraunhofer Gesellschaft
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WP1: Project management
WP2: Ion implantation and silicidation
WP3: Epitaxy
WP4: Nanosecond laser annealing of 3D devices
WP5: Device reliability
WP6: Simulation toolchain and benchmarking
WP7: Dissemination, exploitation, and communication
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