Simulation software will help nanoscale architectures realise the promise of More than Moore


For the last 50 years, shrinking transistors have enabled more and more processing capacity to be put on the same size chips, following Intel co-founder Gordon Moore's predictions in the 1960s. Moore's law is reaching its physical and economic limits – our future virtually unlimited interconnectedness will depend on a paradigm shift.

Much as high-rises are a solution to urban growth, emerging 3D sequential integration could alleviate the problems faced by 2D CMOS transistor technology. Bringing this architecture down to the nanoscale could additionally enhance the already sizeable benefits.

Building on extensive experimental work and data, the EU-funded MUNDFAB project has worked on developing the requisite modelling and simulation tools that will foster innovation via virtual fabrication of the next generation of nanoscale electronic devices.

Duration of project: January 1, 2020 - June 30, 2023

Last update of webpage: April 16, 2024



This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No. 871813.



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from Symposium
"Materials Engineering for Advanced Semiconductor Devices"

The symposium was co-organized by MUNDFAB researches at the E-MRS Spring Meeting 2023

Latest Public Deliverables


Public Version of Deliverable D3.6
(August 2023)

Final Version of KMC Process Models Calibrated with Experiments


Public Deliverable D2.6
(July 2023)

Final Version of the Models for Heated Implants, SPER and Silicidation


Public Deliverable D3.5
(June 2023)

Final Experimental Results on Epitaxy


Public Deliverable D5.6
(June 2023)

Final KMC Models for Defect Formation


Public Deliverable D7.5
(June 2023)

Symposium at the E-MRS Spring Meeting


Public Deliverable D6.3
(March 2023)

Report on the Toolchains for the Test Applications


Public Deliverable D2.4
(February 2023)

Final Experimental Results on Heated Implants and SPER


Public Deliverable D5.5
(February 2023)

Final atomistic catalog of chemical reactions relevant for defect formation

All public deliverables can be found here.