25th International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2020)
September 23 - October 6, 2020, all-virtual conference
The following papers report on results from MUNDFAB:
P.L. Julliard et al.,
Implant Heating Contribution to Amorphous Layer: a KMC Approach (Presentation 3-3)
I. Bejenari et al.,
Molecular Dynamics Modeling of the Radial Heat Transfer from Silicon Nanowires (Presentation 4-2)
A. Sciuto et al.,
Advanced Simulations on Laser Annealing: Explosive Crystallization and Phonon Transport Corrections (Presentation 4-3)
D. Milardovich et al.,
Machine Learning Prediction of Formation Energies in a-SiO2 (Presentation 15-2)