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  • WP1: Project management

  • WP2: Ion implantation and silicidation

  • WP3: Epitaxy

  • WP4: Nanosecond laser annealing of 3D devices

  • WP5: Device reliability

  • WP6: Simulation toolchain and benchmarking

  • WP7: Dissemination, exploitation, and communication

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